Effect of bias voltage on the erosion performance of TiAlSiN coatings on TC6 substrate by high power impulse magnetron sputtering
Li Hua, Liuhe Li, Xiaoting Wang, Guodong Li, Duoduo Li, Luo Yang, Ling Tang, Mingyue Han
Topics & Concepts
Materials scienceHigh-power impulse magnetron sputteringNanoindentationBiasingComposite materialSputter depositionMicrostructureCoatingScanning electron microscopeDiffractometerCavity magnetronSputteringMetallurgyVoltageThin filmNanotechnologyElectrical engineeringEngineeringMetal and Thin Film MechanicsDiamond and Carbon-based Materials ResearchHigh-Temperature Coating Behaviors