Litcius/Paper detail

Understanding the machining mechanism in ultrasonic vibration-assisted nanogrinding of GaN

Jiqiang Wang, Yongda Yan, Shipeng Wei, Guangtao Chen, Hailong Cui, Yanquan Geng, Chen Li

2024Materials Science in Semiconductor Processing12 citationsDOI

Topics & Concepts

Materials scienceGrindingVibrationMachiningComposite materialMetallurgyAcousticsPhysicsAdvanced Surface Polishing TechniquesAdvanced machining processes and optimizationAdvanced Machining and Optimization Techniques