Influence of Si doping on the microstructure and hardness of an AlTiSiN coating deposited by low pressure chemical vapor deposition
Liyong Chen, Lianchang Qiu, Jifei Zhu, Lunwang Yang, Wei Cheng, Liying Wu, Qiumin Yang, Bo Jiang, Zhuopeng Tan, Lei Yin, Hao Chen, Yong Du
Topics & Concepts
Materials scienceMicrostructureChemical vapor depositionCoatingDopingDeposition (geology)Composite materialMetallurgyNanotechnologyOptoelectronicsBiologySedimentPaleontologyMetal and Thin Film MechanicsGaN-based semiconductor devices and materialsAdvanced ceramic materials synthesis