Signal detection and imaging methods for MEMS electron microscope
Marcin Białas, Tomasz Grzebyk, M. Krysztof, Anna Górecka-Drzazga
Topics & Concepts
Microelectromechanical systemsDetectorMicroscopeOpticsElectron microscopeScanning electron microscopeMaterials scienceCathode rayDeflection (physics)SIGNAL (programming language)SiliconElectronOptoelectronicsPhysicsComputer scienceQuantum mechanicsProgramming languageAdvanced Electron Microscopy Techniques and ApplicationsElectron and X-Ray Spectroscopy TechniquesForce Microscopy Techniques and Applications