Integrated 64 pixel UV image sensor and readout in a silicon carbide CMOS technology
Joost Romijn, Sten Vollebregt, Luke M. Middelburg, Brahim El Mansouri, H.W. van Zeijl, Alexander May, Tobias Erlbacher, Johan Leijtens, Guoqi Zhang, P.M. Sarro
Abstract
Abstract This work demonstrates the first on-chip UV optoelectronic integration in 4H-SiC CMOS, which includes an image sensor with 64 active pixels and a total of 1263 transistors on a 100 mm 2 chip. The reported image sensor offers serial digital, analog, and 2-bit ADC outputs and operates at 0.39 Hz with a maximum power consumption of 60 μW, which are significant improvements over previous reports. UV optoelectronics have applications in flame detection, satellites, astronomy, UV photography, and healthcare. The complexity of this optoelectronic system paves the way for new applications such harsh environment microcontrollers.