Effect of RF sputtering power and vacuum annealing on the properties of AZO thin films prepared from ceramic target in confocal configuration
Fatiha Challali, Djelloul Mendil, Tahar Touam, Thierry Chauveau, Valérie Bockelée, Alexis Garcia Sanchez, A. Chelouche, Marie‐Paule Besland
Topics & Concepts
Materials scienceSputteringThin filmX-ray photoelectron spectroscopySputter depositionElectrical resistivity and conductivityTransmittanceAnalytical Chemistry (journal)Annealing (glass)CeramicOptoelectronicsOpticsComposite materialNuclear magnetic resonanceNanotechnologyChemistryPhysicsChromatographyElectrical engineeringEngineeringZnO doping and propertiesGas Sensing Nanomaterials and SensorsCopper-based nanomaterials and applications