Femtosecond laser ultrasonic inspection of a moving object and its application to estimation of silicon wafer coating thickness
Kiyoon Yi, Peipei Liu, Seong‐Hyun Park, Hoon Sohn
Topics & Concepts
WaferMaterials scienceLaserOpticsFemtosecondSiliconUltrasonic sensorOptoelectronicsPulse durationUltrashort pulse laserUltrashort pulseAcousticsPhysicsLaser Material Processing TechniquesPhotoacoustic and Ultrasonic ImagingThermography and Photoacoustic Techniques