Tailoring the surface morphology of carbon nanotube forests by plasma etching: A parametric study
Seungju Seo, Sanha Kim, Shun Yamamoto, Kehang Cui, Takashi Kodama, Junichiro Shiomi, Taiki Inoue, Shohei Chiashi, Shigeo Maruyama, A. John Hart
Topics & Concepts
Etching (microfabrication)Materials scienceCarbon nanotubePlasmaPlasma etchingMorphology (biology)Chemical vapor depositionLayer (electronics)Isotropic etchingMicrostructureNanotubeDry etchingComposite materialCarbon fibersNanotechnologyChemical engineeringGeologyEngineeringPaleontologyComposite numberPhysicsQuantum mechanicsGraphene research and applicationsCarbon Nanotubes in CompositesIon-surface interactions and analysis