Failure modes of protection layers produced by atomic layer deposition of amorphous TiO<sub>2</sub> on GaAs anodes
Pakpoom Buabthong, Zachary P. Ifkovits, Paul A. Kempler, Yikai Chen, Paul Nunez, Bruce S. Brunschwig, Kimberly M. Papadantonakis, Nathan S. Lewis
Abstract
Extrinsic pinhole defects formed during deposition and testing control the short-term protective performance of the a-TiO<sub>2</sub> film for GaAs anodes evolving O<sub>2</sub> from water
Topics & Concepts
Atomic layer depositionMaterials scienceLayer (electronics)Pinhole (optics)Deposition (geology)Amorphous solidAnodeChemical engineeringOptoelectronicsMetallurgyComposite materialOpticsCrystallographyChemistryElectrodePhysical chemistryPaleontologySedimentBiologyPhysicsEngineeringSemiconductor materials and devicesElectronic and Structural Properties of OxidesSemiconductor materials and interfaces