Mechanism study of electropolishing from the perspective of etching isotropy
Rong Yi, Jianwei Ji, Zejin Zhan, Hui Deng
Topics & Concepts
ElectropolishingMaterials scienceEtching (microfabrication)Polarization (electrochemistry)Surface roughnessReactive-ion etchingTungstenIsotropic etchingIsotropyCurrent densitySurface finishElectrolyteComposite materialMetallurgyChemistryOpticsPhysical chemistryPhysicsQuantum mechanicsElectrodeLayer (electronics)Advanced Machining and Optimization TechniquesAdvanced Surface Polishing TechniquesIntegrated Circuits and Semiconductor Failure Analysis