Novel machine learning-based prediction approach for nanoindentation load-deformation in a thin film: Applications to electronic industries
Sujal Laxmikant Vajire, Abhishek Singh, Dinesh Kumar Saini, Anoop Kumar Mukhopadhyay, Kulwant Singh, Dhaneshwar Mishra
Topics & Concepts
Materials scienceNanoindentationThin filmDeformation (meteorology)IndentationSubstrate (aquarium)Gallium nitrideMicroelectromechanical systemsOptoelectronicsComposite materialNanotechnologyLayer (electronics)OceanographyGeologyMetal and Thin Film MechanicsDiamond and Carbon-based Materials ResearchGaN-based semiconductor devices and materials