Single crystal diamond polishing assisted by inductively coupled plasma etching
Jiarong Yu, Xinyue Liu, Rongbin Xu, Daquan Yu
Topics & Concepts
PolishingDiamondInductively coupled plasmaEtching (microfabrication)PlasmaMaterials scienceCrystal (programming language)Plasma etchingInductively coupled plasma mass spectrometryMineralogyChemistryMetallurgyNanotechnologyComputer scienceMass spectrometryPhysicsChromatographyProgramming languageQuantum mechanicsLayer (electronics)Diamond and Carbon-based Materials ResearchAdvanced Surface Polishing TechniquesElectronic and Structural Properties of Oxides