Litcius/Paper detail

Experimental study of chemical mechanical polishing of polycrystalline diamond based on photo-Fenton reaction

Ziyuan Luo, Jiabin Lu, Qiusheng Yan, Weiming Cai, Weilin Huang

2024Materials Science in Semiconductor Processing18 citationsDOI

Topics & Concepts

Materials sciencePolishingPolycrystalline diamondDiamondCrystalliteChemical-mechanical planarizationChemical reactionMetallurgyChemical engineeringComposite materialOrganic chemistryChemistryEngineeringAdvanced Surface Polishing TechniquesDiamond and Carbon-based Materials ResearchLaser Material Processing Techniques