Heterogeneous monolithic 3D integration for hybrid vertical CMOS inverter using n-type IGTO TFT on p-type Si FET
Chanseul Lee, Sunbum Kim, Gyulee Kim, Changhwan Choi
Topics & Concepts
Materials scienceInverterCMOSThin-film transistorOptoelectronicsTransistorElectronic engineeringElectrical engineeringNanotechnologyEngineeringVoltageLayer (electronics)Thin-Film Transistor Technologies3D IC and TSV technologiesSemiconductor materials and devices