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Enhanced ferroelectricity in ultrathin films grown directly on silicon

Suraj Cheema, Daewoong Kwon, Nirmaan Shanker, Roberto dos Reis, Shang-Lin Hsu, Jun Xiao, Haigang Zhang, Ryan Wagner, Adhiraj Datar, Margaret R. McCarter, Claudy Serrao, Ajay K. Yadav, Golnaz Karbasian, Cheng‐Hsiang Hsu, Ava J. Tan, Li‐Chen Wang, Vishal Thakare, Xiang Zhang, Apurva Mehta, Evguenia Karapetrova, Rajesh V. Chopdekar, Padraic Shafer, Elke Arenholz, Chenming Hu, Roger Proksch, R. Ramesh, Jim Ciston, Sayeef Salahuddin

2020Nature889 citationsDOIOpen Access PDF

Topics & Concepts

FerroelectricityMaterials scienceSiliconAtomic layer depositionOptoelectronicsPerovskite (structure)Polarization (electrochemistry)NanometreNanotechnologyThin filmDielectricCrystallographyChemistryComposite materialPhysical chemistryFerroelectric and Negative Capacitance DevicesSemiconductor materials and devicesElectronic and Structural Properties of Oxides
Enhanced ferroelectricity in ultrathin films grown directly on silicon | Litcius