Semiconductor Manufacturing Automation
Tae‐Eog Lee, Hyun-Jung Kim, Tae-Sun Yu
Topics & Concepts
AutomationSystems engineeringEngineeringManufacturing engineeringScheduling (production processes)Semiconductor device fabricationArchitectureSystem integrationRobotComputer scienceEmbedded systemSoftware engineeringWaferOperating systemArtificial intelligenceElectrical engineeringMechanical engineeringVisual artsOperations managementArtScheduling and Optimization AlgorithmsAdvanced Manufacturing and Logistics OptimizationFlexible and Reconfigurable Manufacturing Systems