Piezoelectric hybrid actuation mode to improve speeds in cross-scale micromanipulations
Hongpeng Yu, Jie Deng, Yingxiang Liu, Yingzhi Wang
Topics & Concepts
ActuatorPiezoelectricityMode (computer interface)WorkspaceComputer scienceRange (aeronautics)Mechanical engineeringAcousticsSimulationControl theory (sociology)EngineeringRobotAerospace engineeringPhysicsControl (management)Artificial intelligenceOperating systemPiezoelectric Actuators and ControlAdvanced MEMS and NEMS TechnologiesForce Microscopy Techniques and Applications