A study of MgF2 thin film growth in the atomic layer deposition process by multi-scale simulations
Sung Hoon Lee, Hyunhang Park, Hoon Kim, Minghuang Huang
Topics & Concepts
Atomic layer depositionAdsorptionMagnesium fluorideDensity functional theoryKinetic Monte CarloMaterials scienceThin filmHydrogen fluorideHydrogenDeposition (geology)Chemical physicsImpurityMetalChemical engineeringLayer (electronics)Physical chemistryChemistryComputational chemistryNanotechnologyInorganic chemistryMonte Carlo methodMetallurgyOrganic chemistryPaleontologyEngineeringBiologyMathematicsStatisticsSedimentInorganic Fluorides and Related CompoundsAdvancements in Battery MaterialsSuperconductivity in MgB2 and Alloys