Homoepitaxial Si-doped Gallium Oxide films by MOCVD with tunable electron concentrations and electrical properties
Xueqiang Ji, Jianying Yue, Xiaohui Qi, Zuyong Yan, Shan Li, Chao Lu, Zhitong Li, Zeng Liu, Qi Song, Xu Yan, Jinjin Wang, Shuang Wang, Peigang Li, Weihua Tang, Peigang Li, Weihua Tang
Topics & Concepts
Materials scienceMetalorganic vapour phase epitaxyDopingOptoelectronicsChemical vapor depositionEpitaxyGalliumCrystal (programming language)DiodeAnalytical Chemistry (journal)NanotechnologyChemistryChromatographyMetallurgyProgramming languageComputer scienceLayer (electronics)Ga2O3 and related materialsZnO doping and propertiesAdvanced Photocatalysis Techniques