2D fin field-effect transistors integrated with epitaxial high-k gate oxide
Congwei Tan, Mengshi Yu, Junchuan Tang, Xiaoyin Gao, Yuling Yin, Yichi Zhang, Jingyue Wang, Xinyu Gao, Congcong Zhang, Xuehan Zhou, Liming Zheng, Hongtao Liu, Kaili Jiang, Feng Ding, Hailin Peng
Topics & Concepts
Materials scienceEpitaxyHeterojunctionOptoelectronicsTransistorDielectricFinOxideHigh-κ dielectricGate oxideWaferField-effect transistorNanotechnologyElectrical engineeringVoltageLayer (electronics)EngineeringComposite materialMetallurgyElectronic and Structural Properties of OxidesGa2O3 and related materials2D Materials and Applications