Deposition of titanium films on complex bowl-shaped workpieces using DCMS and HiPIMS
Dong Xie, Lianghuan Wei, H.Y. Liu, K. Zhang, Y.X. Leng, D.T.A. Matthews, Rajesh Ganesan, Yu Su
Topics & Concepts
High-power impulse magnetron sputteringMaterials scienceTitaniumMetallurgyDeposition (geology)Thin filmSputteringNanotechnologySputter depositionBiologyPaleontologySedimentMetal and Thin Film MechanicsDiamond and Carbon-based Materials ResearchHigh-Temperature Coating Behaviors