Laser Direct Writing of Flexible Thermal Flow Sensors
Kaichen Xu, Qi’ao Li, Yuyao Lu, Huayu Luo, Yihui Jian, Dingwei Li, Depeng Kong, Ruohan Wang, Jibing Tan, Zimo Cai, Geng Yang, Bowen Zhu, Qingqing Ye, Huayong Yang, Tiefeng Li
Abstract
Thin film-based thermal flow sensors afford applications in healthcare and industries owing to their merits in preserving initial flow distributions. However, traditional thermal flow sensors are primarily applied to track flow intensities based on hot-wire or hot-film sensing mechanisms due to their relatively facile device configurations and fabrication strategies. Herein, a calorimetric thermal flow sensor is proposed based on laser direct writing to form laser-induced graphene as heaters and temperature sensors, resulting in monitoring both flow intensities and orientations. Via homogeneously surrounding spiral heaters with multiple temperature sensors, the device exhibits high sensitivity (∼162 K·s/m) at small flows with an extended flow detection range (∼25 m/s). Integrating the device with a data-acquisition board and a dual-mode graphical user interface enables wirelessly and dynamically monitoring respiration and the motion of robotic arms. This versatile flow sensor with facile manufacturing affords potentials in health inspection, remote monitoring, and studying hydrodynamics.