Effects of hydrogen plasma treatment on the electrical performances and reliability of InGaZnO thin-film transistors
Ablat Abliz
Topics & Concepts
Thin-film transistorMaterials sciencePassivationThreshold voltageOptoelectronicsPlasmaField effectAmorphous solidReliability (semiconductor)TransistorHydrogenElectron mobilityLayer (electronics)VoltageNanotechnologyElectrical engineeringChemistryCrystallographyQuantum mechanicsEngineeringPower (physics)Organic chemistryPhysicsThin-Film Transistor TechnologiesZnO doping and propertiesElectrical and Thermal Properties of Materials