Fabrication and characterization of a submillimeter-scale ultrasonic motor
Kohei Kikuchi, Mudassir Hussain, Tomoaki Mashimo
Topics & Concepts
Ultrasonic motorPiezoelectric motorStatorFabricationPiezoelectricityUltrasonic sensorSurface micromachiningTorqueVoltageMaterials scienceRotor (electric)Terahertz radiationAcousticsOptoelectronicsElectrical engineeringPhysicsEngineeringThermodynamicsAlternative medicineMedicinePathologyPiezoelectric Actuators and ControlAdvanced MEMS and NEMS TechnologiesMicro and Nano Robotics