Microstructure, mechanical properties and corrosion behavior of Ce doped TiN films
Lei Fan, Ming Liu, Yanlai Wang, Hongbing Cui, Xudong Ren, Bo Xin
Topics & Concepts
Materials scienceTinMicrostructureAmorphous solidDopingCorrosionElastic modulusDielectric spectroscopySputteringSputter depositionMetallurgyAnalytical Chemistry (journal)Chemical engineeringElectrochemistryThin filmComposite materialCrystallographyNanotechnologyPhysical chemistryChemistryEngineeringOptoelectronicsChromatographyElectrodeMetal and Thin Film MechanicsDiamond and Carbon-based Materials ResearchCopper Interconnects and Reliability