Ultrasonic coupled abrasive jet polishing (UC-AJP) of glass-based micro-channel for micro-fluidic chip
Jiangqin Ge, Yile Ren, Chen Li, Zhian Li, Sunting Yan, Ping Tang, Xinsheng Xü, Qiang Wang
Topics & Concepts
PolishingJet (fluid)AbrasiveChemical-mechanical planarizationMechanical engineeringUltrasonic sensorChannel (broadcasting)Materials scienceEngineeringAcousticsMechanicsPhysicsElectrical engineeringErosion and Abrasive MachiningAdvanced Surface Polishing TechniquesDiamond and Carbon-based Materials Research