Argon ion sputtering bridging plasma nitriding and GLC film deposition: Effects on the mechanical and tribological properties
Jie Li, Huanhuan Hong, Lei Sun, Yang Yang, Dongyang Li, Shihong Zhang
Topics & Concepts
Materials scienceNitridingSputteringTribometerCoatingArgonTribologySputter depositionScanning electron microscopeX-ray photoelectron spectroscopyComposite materialThin filmMetallurgyLayer (electronics)Chemical engineeringNanotechnologyChemistryEngineeringOrganic chemistryMetal and Thin Film MechanicsDiamond and Carbon-based Materials ResearchSemiconductor materials and devices