Fluorination behavior of Y2O3-MgO nanocomposite films irradiated by CF4/O2 plasma
Shih-Yung Huang, Yu‐Hao Chang, Wei‐Kai Wang
Topics & Concepts
NanocompositeMaterials scienceMicrostructureEtching (microfabrication)Transmission electron microscopyLayer (electronics)FluorineChemical engineeringPlasma etchingSputteringThin filmComposite materialNanotechnologyMetallurgyEngineeringPlasma Diagnostics and ApplicationsZnO doping and propertiesDiamond and Carbon-based Materials Research