Nano-polishing characteristics in vibration-assisted CMP of single-crystal silicon carbide via molecular dynamics simulations
Yan He, Wenzhi Tang, Peng Gao, Meiling Tang, Lin Fan, Ying Wang, Ying Wang
Topics & Concepts
AbrasiveMaterials scienceDangling bondPolishingMolecular dynamicsSilicon carbideSubstrate (aquarium)Chemical-mechanical planarizationSiliconReaxFFVibrationCrystal (programming language)Abrasion (mechanical)Composite materialNanotechnologyComputational chemistryMetallurgyChemistryInteratomic potentialPhysicsOceanographyComputer scienceQuantum mechanicsProgramming languageGeologyAdvanced Surface Polishing TechniquesDiamond and Carbon-based Materials ResearchAdvanced machining processes and optimization