Phase composition of sputter deposited tungsten thin films
Farzaneh Ahangarani Farahani, Diederik Depla
Topics & Concepts
TungstenMaterials scienceSputteringThin filmPhase (matter)Composition (language)MetallurgyNanotechnologyChemistryArtOrganic chemistryLiteratureMetal and Thin Film MechanicsSemiconductor materials and devicesCopper Interconnects and Reliability