Nanocrystalline diamond film grown by pulsed linear antenna microwave CVD
Jiteng Gu, Zhongxin Chen, Runlai Li, Xiaoxu Zhao, Chandan Das, S. Vicknesh, J. Sudijono, Ming Lin, Kian Ping Loh
Topics & Concepts
Materials scienceResidual stressNanocrystalline materialDiamondComposite materialMicrostructureWaferChemical vapor depositionSubstrate (aquarium)MicrowaveSynthetic diamondOptoelectronicsNanotechnologyPhysicsQuantum mechanicsOceanographyGeologyDiamond and Carbon-based Materials ResearchMetal and Thin Film MechanicsForce Microscopy Techniques and Applications