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Growth of 2-inch diamond films on 4H–SiC substrate by microwave plasma CVD for enhanced thermal performance

Xiufei Hu, Ming Li, Yingnan Wang, Yan Peng, Gongbin Tang, Xiwei Wang, Bin Li, Yiqiu Yang, Mingsheng Xu, Xiangang Xu, Jisheng Han, Kuan Yew Cheong, Kuan Yew Cheong

2023Vacuum23 citationsDOIOpen Access PDF

Topics & Concepts

DiamondMaterials scienceChemical vapor depositionSubstrate (aquarium)Scanning electron microscopeRaman spectroscopyThermal conductivityThermal expansionComposite materialComposite numberGraphiteMaterial properties of diamondAnalytical Chemistry (journal)OptoelectronicsOpticsChemistryOceanographyPhysicsGeologyChromatographyThermal properties of materialsSemiconductor materials and devicesDiamond and Carbon-based Materials Research
Growth of 2-inch diamond films on 4H–SiC substrate by microwave plasma CVD for enhanced thermal performance | Litcius