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Automatic detection of defect positions including interface dislocations and strain measurement in Ge/Si heterostructure from moiré phase processing of TEM image

Qinghua Wang, Shien Ri, Peng Xia, Zhanwei Liu

2020Optics and Lasers in Engineering19 citationsDOI

Topics & Concepts

Materials scienceMoiré patternHeterojunctionZone axisPartial dislocationsCrystal (programming language)Phase (matter)Crystallographic defectInterface (matter)Transmission electron microscopyOpticsDislocationCrystallographyOptoelectronicsDiffractionComputer scienceNanotechnologyPhysicsElectron diffractionChemistryCapillary numberCapillary actionQuantum mechanicsComposite materialProgramming languageForce Microscopy Techniques and ApplicationsAdvanced Electron Microscopy Techniques and ApplicationsIntegrated Circuits and Semiconductor Failure Analysis
Automatic detection of defect positions including interface dislocations and strain measurement in Ge/Si heterostructure from moiré phase processing of TEM image | Litcius