Automatic detection of defect positions including interface dislocations and strain measurement in Ge/Si heterostructure from moiré phase processing of TEM image
Qinghua Wang, Shien Ri, Peng Xia, Zhanwei Liu
Topics & Concepts
Materials scienceMoiré patternHeterojunctionZone axisPartial dislocationsCrystal (programming language)Phase (matter)Crystallographic defectInterface (matter)Transmission electron microscopyOpticsDislocationCrystallographyOptoelectronicsDiffractionComputer scienceNanotechnologyPhysicsElectron diffractionChemistryCapillary numberCapillary actionQuantum mechanicsComposite materialProgramming languageForce Microscopy Techniques and ApplicationsAdvanced Electron Microscopy Techniques and ApplicationsIntegrated Circuits and Semiconductor Failure Analysis