Composition, structure and properties of Mo-N coatings formed by the method of vacuum-arc plasma-assisted deposition
О. В. Крысина, Yu. F. Ivanov, N. N. Koval, N. A. Prokopenko, В. В. Шугуров, Е. А. Петрикова, О. С. Толкачев
Topics & Concepts
Materials scienceCoatingNanocrystalline materialNitrogenNitridePhase (matter)MetalPlasmaVolume fractionAnalytical Chemistry (journal)Deposition (geology)StoichiometryVolume (thermodynamics)NitridingChemical engineeringMetallurgyComposite materialLayer (electronics)NanotechnologyChemistryEngineeringChromatographyOrganic chemistrySedimentPhysicsPaleontologyBiologyQuantum mechanicsMetal and Thin Film MechanicsDiamond and Carbon-based Materials ResearchBoron and Carbon Nanomaterials Research