Plasma treatment of CFX: the effect of surface chemical modification coupled with surface etching
Chaehun Lim, Seongmin Ha, Naeun Ha, Seo Gyeong Jeong, Young‐Seak Lee
Topics & Concepts
PlasmaMaterials scienceSurface modificationPlasma etchingEtching (microfabrication)ElectrochemistryPorosityIsotropic etchingCathodeChemical engineeringComposite materialElectrodeChemistryPhysical chemistryLayer (electronics)PhysicsQuantum mechanicsEngineeringGraphene research and applicationsPlasma Diagnostics and ApplicationsZnO doping and properties