High-aperture EUV microscope using multilayer mirrors and a 3D reconstruction algorithm based on z-tomography
И. В. Малышев, D. G. Reunov, Н. И. Чхало, М. Н. Торопов, А. Е. Пестов, В. Н. Полковников, Н. Н. Цыбин, A. Ya. Lopatin, A. K. Chernyshev, M. S. Mikhailenko, R. M. Smertin, Р. С. Плешков, O. M. Shirokova
Abstract
The article is devoted to the development of an EUV microscope using a wavelength of 13.84 nm. Due to the use of a mirror lens with a large numerical aperture, NA = 0.27, and a short depth of focus, it has been possible to carry out z-tomography of bio-samples for the first time with this type of microscope. A 3D image was reconstructed, and a pixel resolution of 140 nm was obtained. A new simple algorithm for the 3D reconstruction of absorption images from z-tomography data has been proposed that takes into account lens aberrations and a point spread function. The algorithm reduces the inverse absorption task to the corresponding well-studied task of fluorescence microscopy, with an error of 10% for cells up to 10 µm thick.