Advances in fabrication of micro-optical components by femtosecond laser with etching technology
Jiaxin Zheng, Ke‐Shuai Tian, Jin‐Yong Qi, Mingrui Guo, Xueqing Liu
Topics & Concepts
FemtosecondFabricationMaterials scienceEtching (microfabrication)LaserOptoelectronicsDry etchingNanotechnologyOpticsAlternative medicinePhysicsLayer (electronics)MedicinePathologyLaser Material Processing TechniquesNonlinear Optical Materials StudiesPhotonic and Optical Devices