Fabrication of a diamond concave microlens array for laser beam homogenization
Yan Liang, Tianfei Zhu, Mengjia Xi, Haris Naeem Abbasi, Jiao Fu, Rui Su, Zhiqiang Song, Hongxing Wang, Kaiyue Wang
Topics & Concepts
MicrolensDiamondPhotoresistMaterials scienceOpticsPhotolithographyOptoelectronicsHomogenization (climate)Dry etchingFabricationLaserEtching (microfabrication)Layer (electronics)NanotechnologyComposite materialLens (geology)MedicineBiodiversityPhysicsBiologyPathologyAlternative medicineEcologyOptical Coatings and GratingsAdvanced optical system designAdvanced Optical Imaging Technologies