Growth of hexagonal boron nitride films on silicon substrates by low-pressure chemical vapor deposition

Xi Chen, Chunbo Tan, Xiaohang Liu, Kairan Luan, Yufeng Guan, Xiuhuan Liu, Ji-Hong Zhao, Lixin Hou, Yanjun Gao, Zhanguo Chen

2021Journal of Materials Science Materials in Electronics34 citationsDOI

Topics & Concepts

Materials scienceChemical vapor depositionBoronRaman spectroscopyStoichiometrySiliconBoron nitrideThin filmAnalytical Chemistry (journal)Chemical engineeringOptoelectronicsNanotechnologyOpticsChemistryOrganic chemistryPhysicsEngineeringGraphene research and applications2D Materials and ApplicationsDiamond and Carbon-based Materials Research