Synthesis, characterization of CeO2@ZIF-8 composite abrasives and their chemical mechanical polishing behavior on glass substrate
Xiaoyue Yuan, Chuandong Chen, Lei Hong, Zefang Zhang
Topics & Concepts
Materials scienceChemical-mechanical planarizationAbrasiveCerium oxideComposite numberPolishingSubstrate (aquarium)X-ray photoelectron spectroscopyCeriumOxideWettingChemical engineeringComposite materialAbrasion (mechanical)Contact angleMetallurgyGeologyOceanographyEngineeringAdvanced Surface Polishing TechniquesDiamond and Carbon-based Materials ResearchAdvanced materials and composites