A highly efficient semi-finishing approach for polycrystalline diamond film via plasma-based anisotropic etching
Nian Liu, Ling Lei, Huilong Jiang, Yongjie Zhang, Junfeng Xiao, Jianguo Zhang, Xiao Chen, Jianfeng Xu, Kazuya Yamamura
Topics & Concepts
Materials sciencePolycrystalline diamondEtching (microfabrication)CrystalliteDiamondPlasmaAnisotropyPlasma etchingReactive-ion etchingComposite materialOptoelectronicsMetallurgyOpticsPhysicsQuantum mechanicsLayer (electronics)Diamond and Carbon-based Materials ResearchMetal and Thin Film MechanicsAdvanced Surface Polishing Techniques