Undeformed chip thickness modeling in EUVAG considering wheel topography evolution
Kun Zhang, Zhen Yin, Yanjun Lu, Chenwei Dai, Qinglong An, Zhiqiang Liang, Qing Miao, Ming Zhang, Ziyang Cao, Hua Li
Topics & Concepts
ChipMaterials scienceMechanical engineeringGeometryEngineeringMathematicsElectrical engineeringAdvanced Surface Polishing TechniquesAdvanced machining processes and optimizationAdvancements in Photolithography Techniques