Litcius/Paper detail

Heterogeneous and Chiplet Integration Using Organic Interposer (CoWoS-R)

Shin-Puu Jeng, Monsen Liu

20222022 International Electron Devices Meeting (IEDM)18 citationsDOI

Abstract

Interposer technology is successfully adopted for heterogeneous and chiplet integration because of its advantages in electrical performance, warpage control, yield and reliability. Organic interposer (CoWoS-R) technology is one of the most promising new integration interposer platforms, providing low RC interconnect with good signal isolation and design scalability. New integrated de-cap capacitors suppress the power domain noise and enhance the HBM3 signal integrity at high data rate.

Topics & Concepts

InterposerComputer scienceProcess engineeringMaterials scienceEngineeringNanotechnologyEtching (microfabrication)Layer (electronics)Semiconductor Lasers and Optical Devices3D IC and TSV technologiesInterconnection Networks and Systems