In-situ crystalline TiNi thin films deposited by HiPIMS at a low substrate temperature
Xuebing Bai, Qun Cai, Wenhao Xie, Yuqiao Zeng, Chenglin Chu, Xuhai Zhang
Topics & Concepts
Materials scienceCrystallizationHigh-power impulse magnetron sputteringThin filmAmorphous solidAnnealing (glass)Substrate (aquarium)Sputter depositionChemical engineeringMetallurgyComposite materialSputteringNanotechnologyCrystallographyEngineeringChemistryGeologyOceanographyMetal and Thin Film MechanicsCopper Interconnects and ReliabilityAdvanced Memory and Neural Computing