Litcius/Paper detail

A Review of Thin-film Thickness Measurements using Optical Methods

Jungjae Park, Yong Jai Cho, Won Chegal, Joonyoung Lee, Yoon‐Soo Jang, Jonghan Jin

2024International Journal of Precision Engineering and Manufacturing36 citationsDOI

Topics & Concepts

ReflectometryThin filmMaterials scienceEllipsometryOpticsReliability (semiconductor)InterferometryPolarization (electrochemistry)Measure (data warehouse)OptoelectronicsComputer scienceNanotechnologyTime domainPhysicsChemistryComputer visionPhysical chemistryDatabaseQuantum mechanicsPower (physics)Optical Polarization and EllipsometrySurface Roughness and Optical MeasurementsOptical Coatings and Gratings