A Review of Thin-film Thickness Measurements using Optical Methods
Jungjae Park, Yong Jai Cho, Won Chegal, Joonyoung Lee, Yoon‐Soo Jang, Jonghan Jin
Topics & Concepts
ReflectometryThin filmMaterials scienceEllipsometryOpticsReliability (semiconductor)InterferometryPolarization (electrochemistry)Measure (data warehouse)OptoelectronicsComputer scienceNanotechnologyTime domainPhysicsChemistryComputer visionPhysical chemistryDatabaseQuantum mechanicsPower (physics)Optical Polarization and EllipsometrySurface Roughness and Optical MeasurementsOptical Coatings and Gratings