Insights into triazole derivatives as potential corrosion inhibitors in CMP process: Experimental evaluation and theoretical analysis
Wei Li, Baimei Tan, Shihao Zhang, Lei Guo, Jinbo Ji, Mei Yan, Ru Wang
Topics & Concepts
CopperAdsorptionCorrosionErosion corrosion of copper water tubesElectrochemistryChemistryChemical-mechanical planarizationLangmuir adsorption modelCorrosion inhibitorDensity functional theoryMoleculeMetalTriazoleComputational chemistryInorganic chemistryMaterials scienceChemical engineeringPhysical chemistryOrganic chemistryElectrodeLayer (electronics)EngineeringCorrosion Behavior and InhibitionMetal Extraction and BioleachingAdvanced Surface Polishing Techniques