Thermodynamic Analysis of Dissolved Oxygen in a Silicon Melt and the Effect of Processing Parameters on the Oxygen Distribution in Single-crystal Silicon During Czochralski Growth
Tai Li, Liang Zhao, Guoqiang Lv, Wenhui Ma, Mengyu Zhang, Zhenling Huang, Liang Zhao
Topics & Concepts
SiliconCrucible (geodemography)Materials scienceOxygenImpurityCrystal (programming language)Micro-pulling-downLimiting oxygen concentrationPartial pressureSingle crystalCrystal growthAnalytical Chemistry (journal)CrystallographyMetallurgyChemistryChromatographyOrganic chemistryComputer scienceProgramming languageComputational chemistrySilicon and Solar Cell TechnologiesAdvanced Surface Polishing TechniquesThin-Film Transistor Technologies