Theoretical and experimental investigation on material removal mechanism in dual-rotation polishing of fused silica glass
Liang Zhi-Dong, Zhong-Chen Cao
Topics & Concepts
Materials sciencePolishingDual (grammatical number)Composite materialMechanism (biology)Silica glassRotation (mathematics)Chemical-mechanical planarizationGeometryArtLiteratureMathematicsEpistemologyPhilosophyAdvanced Surface Polishing TechniquesAdvanced machining processes and optimizationTunneling and Rock Mechanics