The effect of contact types on SiC polishing process
Yuqi Zhou, Yuhua Huang, Jinming Li, Fulong Zhu
Topics & Concepts
AbrasiveMaterials scienceDiamondPolishingWaferRotation (mathematics)Composite materialGraphiteRotational speedMechanical engineeringNanotechnologyMathematicsGeometryEngineeringAdvanced Surface Polishing TechniquesDiamond and Carbon-based Materials ResearchAdvanced machining processes and optimization