Effect of RF power of Al2O3 target on the physical properties of aluminum-doped zinc oxide films
M.F. Hasaneen, M. M. Abd El‐Raheem, Mahrous R. Ahmed
Topics & Concepts
Amorphous solidThin filmMaterials scienceRefractive indexBand gapFigure of meritSheet resistanceDopingElectrical resistivity and conductivitySputter depositionZincAnalytical Chemistry (journal)OptoelectronicsSputteringOpticsChemistryNanotechnologyPhysicsCrystallographyLayer (electronics)MetallurgyQuantum mechanicsChromatographyZnO doping and propertiesChalcogenide Semiconductor Thin FilmsCopper-based nanomaterials and applications